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Conforms to standards for semiconductor FOUP cassettes to enable accurately detecting FOUP cassettes without being affected by the material, color, or reflectance of the bottoms of the cassettes.
| Models | EE- SPY801/802 | ||
| Sensing distance (Standard sensing object) | 0 to 5 mm ( White paper: 15 × 15 mm2, reflection factor: 90%) 0 to 3 mm ( Black paper: 15 × 15 mm2, reflection factor: 10%) | ||
| Sensing object | Transparent or opaque wafer carriers | ||
| Operation indicator | Lit orange when object is detected. | ||
| Light source | GaAs infrared LED with a peak wavelength of 940 nm | ||
| Supply voltage | 12 to 24 VDC ±10%, ripple (p-p): 5% max. | ||
| Current consumption | 30 mA max. | ||
| Control output | NPN open collector: Load power supply voltage: 5 to 24 VDC Load current: 100 mA max. OFF current: 0.5 mA max. 100 mA load current with a residual voltage of 0.8 V max. 40 mA load current with a residual voltage of 0.4 V max. | ||
| Response time | 5 ms max. | ||
| Ambient illumination | 3,000 lx max. with incandescent light or sunlight on the surface of the receiver | ||
| Ambient temperature range | Operating: – 10 to +55 ° C Storage: – 25 to +65 ° C (with no icing) | ||
| Ambient humidity range | Operating: 5% to 85% Storage: 5% to 95% (with no condensation) | ||
| Vibration resistance | Destruction: 1 to 500 Hz, 1.0-mm single amplitude or 150 m/s2 each in X, Y, and Z directions 3 times and for 11 min. each | ||
| Shock resistance | Destruction: 500 m/s2 for 3 times each in X, Y, and Z directions | ||
| Degree of protection | IEC IP30 | ||
| Connecting method | Pre-wired (Standard length: 2 m) | ||
| Weight (packaged) | Sensor: Approx. 43 g; Accessory (Pedestal): Approx. 9 g | ||
| Model NPN output | EE-SA801A | EE-SA801A-R | EE-SA701-R |
| PNP output | EE-SA801R | EE-SA801R-R | EE-SA701P-R |
| Indicator | Light red when actuator is pressed. | Lit red while there is no load on actuator | |
| Free position (FP) | 5.0±0.4 mm | ||
| Operating position (OP) | 3.5 to 4.5 mm *2 | ||
| Total travel position (TTP) | 0 mm max. | ||
| Operating load *3 | 3 N max. (typical: 0.5 N) | ||
| Supply voltage | 12 to 24 VDC±10%, ripple (p-p): 10% max. | ||
| Current consumption | 35 mA max. | ||
| Control output | NPN Models: NPN open collector, 5 to 24 VDC, 50 mA max.; residual voltage of 0.4 V max. at 50-mA load current OFF current: 0.5 mA max. PNP Models: PNP open collector, 5 to 24 VDC, 50 mA max.; residual voltage of 0.4 V max. at 50-mA load current OFF current: 0.5 mA max. | ||
| Protection circuits | Reversed power supply polarity protection | ||
| Ambient temperature range | Operating: -25 to +55°C Storage: -30 to +60°C (with no icing or condensation) | ||
| Ambient humidity range | Operating: 5% to 85% Storage: 5% to 95% (with no condensation) | ||
| Mechanical durability | 5,000,000 operations min. (One operation is from the free position to operating position and back to the free position.) | ||
| Vibration resistance | Destruction: 10 to 500 Hz, 1.0-mm single amplitude or 150 m/s2 3 times each in X, Y, and Z directions for 11 min. each | ||
| Shock resistance | Destruction: 500 m/s2 for 3 times each in X, Y, and Z directions | ||
| Degree of protection | IEC IP40 | ||
| Connecting method | Pre-wired (standard cable length: 1 m) | Pre-wired (robot cable length: 1 m) | |
| Weight | Approx. 16.1 g |